Ion Milling/Photolithography

Thin film circuit fabrication and thin film component manufacturing is performed using both wet and dry etching (ion milling and RIE) techniques.

Photolithography tools and equipment are set up for Circuit Fabrication. Wet and Dry etching services are available and can be performed by itself in addition to being done as a step during a coating process. Our Ion Milling systems are set up for dry etching for vertical side walls when required as well.